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Automatic Wafer Geometry Gauge/Sorter ( MX6012-DRAT-8C )
One or two scans (90°) possible
1 up to 57 measurement points
Wafer diameter up to 300 mm
Dynamic range 300 µm
Accuracy 0.1 µm, Resolution 10nm
Resistivity:0.001 - 200 Ohm-cm, Dotation:0.02 – 200 Ohm-cm
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