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Automatic Wafer Geometry Gauge/Sorter ( MX6012-DRAT-8C )

 

 One or two scans (90°) possible
 1 up to 57 measurement points
 Wafer diameter up to 300 mm
 Dynamic range 300 µm
 Accuracy 0.1 µm, Resolution 10nm
 Resistivity:0.001 - 200 Ohm-cm, Dotation:0.02 – 200 Ohm-cm
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