200mm Contactless Wafer Gauge for Resistivity, Thickness and P/N ( MX608 )
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Max. two radial scans to display wafer Thickness, TTV, Resistivity, and P/N type |
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Up to 15 points in one row and optionally an identical scan after 90° rotation |
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High throughput：one scan < 10 sec and eight scans < 20 sec |
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Resistivity 0.001 - 200 Ohm-cm, Dotation：0.02 – 200 Ohm-cm |
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