Magic Mirror Automated Defect Detection System ( Magic Mirror )
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Useful for detecting problems with many types of wafer processes |
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Polishing, Epitaxy, Oxidation, Diffusion, CVD, Post Implant Annealing, RTP, CMP, SOI |
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Automatic Defect Detection with Hologenix ADDS Image Processing Software |
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Windows NT Environment and Optional SECS II – GEM function |
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Edge Grip Wafer Handling |
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