Contactless Layer Thickness Measurement ( SemDex Mf 201 )
.jpg)
 |
Contactless measurements in reflection mode |
|
Automatic beam refocusing at various working heights (multiple chuck) |
|
All different materials measurable: Silicon, InGaAs, InP, SiC, |
| TFT-Glass, Ceramics, Tape, Photoresist, etc. | |
|
(Multiple-) layer thicknesses, bow / warp and flatness in one scan available |
|
Very high acquisition rates of up to 16 kHz |
| Back | |