JC's Chunson - SolarEnergy -- E+H ( MX152 )

Electronic Thickness and Resistivity Gauge ( MX152 )

	Thickness, TT, Resistivity, P/N Type
	Non-contact capacitance sensor
	Resolution 0.1 µm, Accuracy 0.25 µm
	Automatic, In-Line measurement
	Throughput > 3600 wafer / hr (Depends on belt speed)
Back