Wafer Geometry Gauge
MX203 Series
♦ Non-contact sensors
♦ Resolution 0.1 µm,accuracy < 0.25 μm
♦ Measuring in Short time (5 sec.)
♦ Thickness, TTV, Flatness, Warp, Bow
♦ 3D Mapping Profile
冲成股份有限公司 / JC's Chunson Limited
Tel:+886-2-3234-1279 Fax:+886-3234-7056
Add.:No. 764, Zhong-Zheng Road, Zhong-He, New Taipei City 23586, Taiwan