Robot Sorters
E+H
Which modules are there? Quite simple: we realize what you need. Aligned to the very highest standards: Your requirements! And of course international calibration standards. Here are a few examples of currently installed modules and applications:
Measuring modules: Many of E+H’s standard MX gauges can be used on robot sorters, such as: MX 10x series (thickness measurement), MX 20x series (geometry/area: thickness, deformation, stress), MX 60x series (thickness, resistance), MX 70x series (thickness, warpage, waviness, roughness).
。Robotic Handling Systems: Fully automated wafer transfer, usable for sample measurement or sorting, radial range up to 14.4“ plus end effector, high reproducibility +/-25μm, low contamination, compatible with clean room class 1, single and double arm, end effector built to customer specifications; MTBF >75,000 hours
。Aligner: high reproducibilityX/Y +/-50μm, theta +/- 0.04° (3 sigma), MTBF >65,000 hours, cleanroom class 1 compatible, available for 3-8“ or 8“-12“, optionally equipped with OCR reader for wafer IDs
。Stations: Safe placement of 2“-12“ carriers, carrier presence sensors according to your requirements, control panels with individual operating and display elements
。Other components: PC and TFT, RF carrier ID reader, ionizer, clean room class 1 filter systems, loading ports SMIF, FOUP, light tower, etc.
。Software: All our MX tool series use the same Windows operating software MX-NT V2. Sorting by any obtained characteristics, such as grouping by thickness or OCR code, can be done by highly flexible and reusable recipes.
Characteristics
。Thickness
。Film stress
Example requirements
300mm wafers, with automatic handling robot, tracks, pre-aligner, multiple loading ports before and after measurement.
| Measuring | MX2012 |
| Robot Handling System | 300mm |
| Pre-Aligner | 1 |
| Cassette Station | 2 |
| Software | MX-NT V2 |