E+H
Fast chip production geometry gauge for 300mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
| Wafer Diameter | 300mm |
| Thickness Accuracy | ±0.5 µm |
| Resolution | 50nm |
| Thickness range | 500 - 900 µm |
| Automatic wafer geometry gauge | yes |
| Software | MXNT |