E+H
Automatable geometry gauge for 100mm and 150mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Film stress
| Wafer Diameter | 125mm, 150mm (100mm is optional) |
| Thickness Accuracy | ±0.6 µm |
| Resolution | 50nm |
| Thickness range | 100 - 700 µm |
| Automatic wafer geometry gauge | yes |
| Bow & Warp include gravity connection | no |
| Software | MXNT |