E+H
Automatable geometry gauge for thin 150mm and 200mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
| Wafer Diameter | 150mm, 200mm |
| Accuracy | ±1 µm |
| Resolution | 0.1µm |
| Thickness range | 100 - 700 µm |
| Automatic wafer geometry gauge | yes |
| Bow & Warp include gravity connection | no |
| Software | MXNT |