E+H
Easy one-point thickness gauge for 75–300mm silicon wafers.
Measurement type
。Thickness
| Wafer Diameter | up to 300mm |
| Accuracy | ±0.5 µm |
| Resolution | 10nm |
| Dynamic range | 800µm |
| Thickness range | default 200 - 1000 µm |
| Switchable to measure high-res material | yes |
| Software | EHMaster |