E+H
Fast contactless resistivity gauge for semi-insulating wafers up to 150mm.
Measurement type
。Thickness
。Resistivity
。Sheet resistance
。P/N Dotation
| Wafer Diameter | up to 150mm |
| Sensor Area Ø | 10mm |
| Thickness range | 350 - 650 µm |
| Measuring Time | max. 4 sec. |
| Reproducibility | ± 1% |
| Software | EHMaster |