E+H
Automatable geometry gauge for 182 and 210mm solar wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori
| Wafer Diameter | 182mm, 210mm |
| Thickness Accuracy | ±0.5 µm |
| Resolution | 75nm |
| Thickness range | 200 - 600 µm |
| Automatic wafer | geometry gauge yes |
| Software | MXNT |