E+H
Automatable geometry gauge for 125–156mm solar wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
。Sori
| Wafer Diameter | 125mm, 156mm |
| Thickness Accuracy | ±1 µm |
| Resolution | 0.1µm |
| Thickness range | 200 - 600 µm |
| Automatic wafer geometry gauge | Yes |
| Software | MXNT |