E+H
Automatable bow and warp gauge for 450mm silicon wafers.
Measurement type
。Thickness
。Flatness (TTV)
。Bow
。Warp
| Wafer Diameter | 300mm, 450mm |
| Warp Accuracy | ±5 µm + 5% of reading |
| Warp Precision | ±0.5 µm + 1% of reading |
| Warp range | 800 µm |
| Automatic wafer geometry gauge | yes |
| Software | MXNT |