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PRODUCTS

Belt Sorters

E+H

E+H modular belt sorter systems enable specific sorting and measurements with our well proven MX systems, belt transport, receiving stations with wafer switches and much more. More than 35 years of development ensure smooth integration into your production chain - exactly as your process requires.

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Components & Modules
Advantages and Features
規格

Our Belt Sorters are used for a wide range of applications. These modules are mainly installed:

。Measuring modules: MX 202 Metrology Modules, AZ6 (6-33) or AZ8 (8-37) geometry module, T-Module with single thickness sensor pair, Resistivity module with integrated optional P/N sensor

。Handling Modules: Sender/receiver lifts, Wafer switches to distribute Wafers in receiver area, movable units with mounted lifts, pass through stations

。Software: All our MX tool series use one and the same Windows operating software MX-NT V2. It combines more than 20 years expericence in Semiconductor requirements.

Sorting by any gained characteristic, such as grouping by thickness, can be done by highly flexible and reusable recipes.

All data can be stored in a MS SQL Server data base or alternatively also into MS Access data bases.

Powerful software options such as a SECS/GEM automation interface or our similar proprietary Simple Soap Server One (S³O) interface allow seamless integration of E+H tools into your production plant.

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